Comparison ledger
Cascade Microtech 103-754, MPI TS 3500 Automatic Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 103-754Cascade Microtech | |
|---|---|---|
| OEM | Cascade Microtech | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | 6-inch diameter microchamber and thermal chuck | Wafer ID Reader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech 103-754 | MPI TS 3500 Automatic Wafer |
| Cited variants | — | |
| Specifications | ||
| type | x-y-z-θ probe positioner[2] | — |
| installed on | HFTL 50-GHz Small-Signal Probe Station[2] | — |
| quantity in station | two[2] | — |
| station chuck size | 6-inch-diameter microchamber and thermal chuck[2] | — |
| Quantity per station | Two positioners[2] | — |
| Chuck size | 6-inch-diameter microchamber and thermal chuck[2] | — |
| Temperature range | -50 to 200 °C[2] | — |
| Software | — | Sentio[3] |
| AST | — | RC-300 T-SA[4] |
| TS 3500 Series replaces PN | — | RC 300 T[4] |
| Wafer size | — | Wafer ID Reader[3] |
| Manufacturer | — | MPI[3] |
| Category | — | Test & Probe[3] |
| Automation | — | 300 mm fully automated probe station[1] |
| Supported wafer sizes | — | 150, 200, or 300 mm[5] |
| Wafer ID-Reader | — | Option for top or bottom ID reading[5] |
| Wafer pre-aligner | — | Included[5] |
| Cassette scanner | — | Included[5] |
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