Waferpedia

Comparison ledger

1000 Hot PlateversusBlue M Tube

CEE 1000 Hot Plate, Lindberg Blue M Tube, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Blue M TubeLindberg
OEMCEELindberg
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateLindberg Blue M Tube
Cited variants—
  • STF55666C-1[1]
  • TF55030A-1 / TF55035A-1 (Mini-Mite series)[2]
  • HTF55322A (Split-Hinge series)[3]
Specifications
Configuration4"[4]—
TypeHot Plate[4]—
Wafer Size4 inch[4]—
Tube Furnace Model #—STF55666C-1[5]
Maximum Temperature—1200°C[3]
Process Tube Diameter—1 to 3 in. (2.54 to 7.62 cm)[3]
Heated Zone Length (Mini-Mite)—305 mm[2]
Temperature Range (Mini-Mite)—100°C to 1100°C[2]
Power Consumption (Mini-Mite)—800 W[2]
Electrical Requirements (Mini-Mite)—120 V or 208/240 V, 50/60 Hz[6]
Oven Type (Mini-Mite)—Split-hinge design[2]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]knowledge1.thermofisher.comknowledge1.thermofisher.com
  2. [2]thermofisher.comthermofisher.com
  3. [3]thermofisher.comthermofisher.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]knowledge1.thermofisher.comknowledge1.thermofisher.com