Waferpedia

Comparison ledger

1000 Hot PlateversusAlpha 805 Diffusion

CEE 1000 Hot Plate, Tokyo Electron Alpha 805 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Alpha 805 DiffusionTokyo Electron
OEMCEETokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateTokyo Electron Alpha 805 Diffusion
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]8 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing