Waferpedia

Comparison ledger

Spectra G 800versus1300 Series Safety

Edwards Spectra G 800, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
OEMEdwardsThermo Fisher
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2026 Third-party support only
Control system——
Generation——
FamilyEdwards Spectra G 800Thermo Fisher 1300
Specifications
Configuration4 port inlets[1]Class II[3]
Phase3 Phase[1]—
Maximum gas flow rate800 slm[2]—
Number of inlet ports1 to 4[2]—
Electrical supply200-208 VAC 3-phase[2]—
Frequency50/60 Hz[2]—
Power consumption4 kW[2]—
Nitrogen supply pressure7 bar[2]—
Fuel gas supply pressure137 mbar (2 psi)[2]—
Extract flow rate60 Nm3/min[2]—
Mass658 Kg[2]—
Combustion stages4-stage[2]—
Number of inlet ports (listing source)4 port inlets[1]—
Cabinet type—Class II, Type A2 biological safety cabinet[4]
Airflow compensation—SmartFlow airflow compensation system[4]
Motors—Dual DC motors[4]
Front window design—SmartClean front window design[4]
Control panel—Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[4]
UV light—Programmable UV light[4]
SmartPort—SmartPort convenience for routing tubing and cables through the side walls[4]
Available widths—3-foot, 4-foot, 5-foot, and 6-foot sizes[4]
Front opening choices—8-inch or 10-inch front opening[4]
Filter specification—H14 HEPA filters, EN 1822, 99.995% @ MPPS[5]
Certification—NSF/ANSI 49, UL, CE[5]
Service valves—Up to 6 total, 3 on each side wall[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing
  4. [4]thermofisher.comthermofisher.com
  5. [5]documents.thermofisher.comdocuments.thermofisher.com