Comparison ledger
Espec EHS-412MD, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EHS-412MDEspec | 1007KLA |
|---|---|---|
| OEM | Espec | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Espec EHS-412MD | KLA 1007 |
| Cited variants | — | |
| Specifications | ||
| Category | Highly accelerated stress test system[1] | — |
| Temperature range | +105.0°C to +162.2°C[1] | — |
| Humidity range | 75%rh to 100%rh[1] | — |
| Pressure range | 0.019 to 0.389 MPa (gauge)[1] | — |
| Interior dimensions | φ294×L318 mm ×2stage[1] | — |
| Model | EHS-412MD[1] | 1007[4] |
| Type | Highly Accelerated Stress Test (HAST) chamber[2] | — |
| Interior volume | 21 liters x 2[3] | — |
| Test area dimensions | ø394 x D426(404) mm[3] | — |
| Power supply | 208V (±5% w/grounded neutral) 1ph 60Hz, 30 service amps (25 FLA)[2] | — |
| Control mode | Unsaturated or saturated humidity control; multi-mode 'M' system controls humidity via wet bulb/dry bulb during heat-up and cool-down[2] | — |
| Compliance | Fully conforms to EIA/JEDEC test method A110 & 102C[2] | — |
| Controller | Touch-screen controller with temperature, humidity, and count-down display[2] | — |
| Connectivity | Ethernet interface for remote access, data downloads, and email alerts[2] | — |
| Shelves | Two stainless steel shelves[2] | — |
| Safety features | Overheat and over-pressure protectors; door lock safety mechanism[2] | — |
| Exterior dimensions | 760 x 1000 x 1796 mm[2] | — |
| Power | 208V (±5% w/grounded neutral) 1ph 60Hz, 30 service amps (25 FLA)[2] | — |
| Features | Unsaturated or saturated humidity control; multi-mode M system; touch-screen controller; Ethernet interface; specimen power terminals[2] | — |
| Manufacturer | — | KLA[4] |
| Description | — | Wafer Prober[4] |
| Wafer size | — | 150 mm[4] |
| Convertible to 8 inch wafer size | — | Yes[4] |
| Vintage | — | 01.06.1995[4] |
| Make | — | KLA[5] |
| Equipment type | — | Prober[5] |
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