Comparison ledger
EV Group 101, Quintel Q 4000 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | Q 4000 MaskQuintel |
|---|---|---|
| OEM | EV Group | Quintel |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | Quintel Q 4000 Mask |
| Specifications | ||
| OEM | EV Group[1] | — |
| Model | 101[1] | — |
| Equipment name | EVG 101 Spray Coater[1] | — |
| NEMO ID | evgspraycoat[1] | — |
| Training required | EVG 101 Training[1] | — |
| Training duration | 1.50 hours[1] | — |
| Processing technique | Resist Spray Coat (manual)[1] | — |
| Cleanliness | "All"[1] | — |
| Location | SNF Paul G Allen L107 Cleanroom[1] | — |
| Wafer diameter (substrate size) | up to 300 mm[2] | — |
| Available modules | Spin coat / OmniSpray® / develop[2] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[2] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[2] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[3] | — |
| Cleanliness group (at SNF) | "All"[1] | — |
| Configuration | — | Quintel Power Supply 365-405nm source; bottom shelve right side.[4] |
| Equipment type | — | Mask aligner[4] |
| Power supply source | — | 365-405nm source[4] |
| Mask holder | — | Fixed[4] |
| Split field objectives | — | With zoom capabilities[4] |
| Head lift exposure source | — | With zoom objectives[4] |
| Illumination control panel and vacuum/separation pressure gauge | — | Left side[4] |
| Joy stick 1 | — | Mask viewing manipulator; left side[4] |
| Joy stick 2 | — | Substrate manipulator; right side[4] |
| Theta substrate adjustor | — | Left side[4] |
| Objective focus switch / coarse align / contact separation button | — | Right side[4] |
| Parameter control display panel | — | Right side[4] |
| Power on switch | — | Right side[4] |
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