Comparison ledger
EV Group 40 Top-to-Bottom Side Measurement, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | EV Group | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 40 | KLA .204 PSL Wafer |
| Cited variants |
| — |
| Specifications | ||
| Voltage | 120-230 V[2] | — |
| Configuration | 50/60 Hz[2] | NIST Traceable[3] |
| Manual Alignment Stage | Yes[2] | — |
| PC-based Measurement System | Yes[2] | — |
| Frequency | 50/60 Hz[2] | — |
| Wafer Sizes | 2, 3, 4, 5, 6, 8 inch (up to 200 mm)[2] | — |
| Vintage | 2002[2] | — |
| Measurement Type | Destruction-free alignment accuracy[1] | — |
| Wafer Size | — | 8 inch[3] |
| Traceability | — | NIST[4] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[3] |
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