Waferpedia

Comparison ledger

1088versus310TA

Heller 1088, YES 310TA, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1088Heller
OEMHellerYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size—up to 6-inch wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1088YES 310TA
Cited variants—
Specifications
Heating Zones8 zones (4 top and 4 below) plus 1 cooling zone[2]—
Heating MethodForced convection[2]—
Conveyor Width18 inches (45 cm)[2]—
Heated Length43.5 inches (111 cm)[2]—
Overall Length96 inches (244 cm)[2]—
Height50 inches (127 cm)[2]—
Net Weight900 lbs (409 kg)[2]—
Thermal ProfilerIncluded[2]—
Oven TopCounter balance for easy access to conveyor[2]—
Solder CompatibilityLead-free and leaded soldering[2]—
Model—310TA[3]
Equipment type—HMDS Vapor Prime Oven[3]
Description—Vacuum cure & HMDS vapor prime oven[4]
Priming agent—HMDS in vapor phase[4]
Process temperature—150 °C[4]
Exposure time—300 s[4]
Total process time including purges—~15 min[4]
Carrier capacity—25 slots for 4-inch or 6-inch wafers per cassette[4]
Wafer compatibility—up to 6-inch wafers[4]
Process type—HMDS vapor priming[4]
Temperature—150 °C[4]
Total process time—~15 min[4]
Wafer capacity—25 slots for 4″ or 6″ wafers[4]
Maximum wafer size—up to 6-inch[3]
HMDS exposure time—300 seconds[4]
Wafer size capacity—up to 6-inch[3]
Cassette capacity—25 slots for 4" or 6" wafers[4]
Wafer size—up to 6-inch wafers[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]smtdevices.comsmtdevices.com
  3. [3]colorado.educolorado.edu
  4. [4]epfl.chepfl.ch