Comparison ledger
Hitachi 1305 BSG 3, Lam Research Gasonics Aura 1000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | Gasonics Aura 1000Lam Research |
|---|---|---|
| OEM | Hitachi | Lam Research |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Lam Research Gasonics Aura 1000 |
| Specifications | ||
| Configuration | — | Tabletop (4)[1] |
| Configurations | — | Tabletop (4) or Floor (1)[1] |
| Power Requirement | — | 208VAC 3-Phase[2] |
| Process Gases | — | O2, CF4[2] |
| Plasma Source | — | Microwave (magnetron)[2] |
| Chamber Material | — | Ceramic/Quartz[2] |
| Pneumatics Power | — | Nitrogen or Clean Dry Air (CDA)[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →