Comparison ledger
Hitachi S 806, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 806Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 806 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Manufacturer | Hitachi[1] | — |
| Model | S 806[1] | — |
| Tool type | SEM (Scanning Electron Microscope)[1] | — |
| Wafer sizes | 6 inch[1] | — |
| Category | Metrology & Inspection[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer Size | — | 8 inch[3] |
| NIST Traceable | — | True[3] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →