Comparison ledger
KLA 1.112 PSL Wafer, Zygo Newview 7300 3D Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Zygo |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zygo Newview 7300 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 1X, 2X, 5X Objectives[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Phase | — | 3 Amps / 1 Phase[3] |
| Technology | — | White light interferometry / Coherence Scanning Interferometry (CSI)[4] |
| Z Resolution | — | Sub-angstrom[4] |
| Max Substrate Size | — | 8 inch[4] |
| Profile Height Range | — | < 1 nm up to 10000 m[4] |
| Objectives | — | 1X, 2X, 5X[3] |
| Power | — | 100-240 Volts / 50/60 Hertz[3] |
| Current / Phase | — | 3 Amps / 1 Phase[3] |
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