Comparison ledger
KLA 1007, Tokyo Electron Precio, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | PrecioTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | Single FOUP Wafer Loader (Right) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron Precio |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | KLA[2] | — |
| Model | 1007[2] | — |
| Description | Wafer Prober[2] | — |
| Wafer size | 150 mm[2] | Single FOUP Wafer Loader (Right)[5] |
| Convertible to 8 inch wafer size | Yes[2] | — |
| Vintage | 01.06.1995[2] | ~2007[5] |
| Make | KLA[3] | — |
| Equipment type | Prober[3] | — |
| Tri-temp Chuck | — | -25C to 150C[4] |
| Configuration | — | Dual Load Port[4] |
| Wafer size (mm) | — | 200, 300[1] |
| XY probing accuracy (μm) | — | ±1.8[1] |
| Z probing accuracy (μm) | — | ±5.0[1] |
| Probing force (kg) | — | 200/300*[1] |
| Optical system | — | ASU/BCU-Ⅱ[1] |
| Operation system | — | Windows+VME[1] |
| Stage technology | — | Ball screw[1] |
| Product type | — | Fully automatic wafer-probing platform[1] |
| Application | — | Wafer testing[1] |
| Chuck | — | Nickel hot & cold chuck unit[5] |
| Loader | — | Single FOUP Wafer Loader (Right)[5] |
| Tester interface | — | GPIB tester interface[5] |
| Chiller | — | C355 / RD9915 chiller[5] |
| XY accuracy | — | ±1.8 µm[1] |
| Z accuracy | — | 5 µm[1] |
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