Waferpedia

Comparison ledger

.496 PSL WaferversusSolid State

KLA .496 PSL Wafer, KLA Solid State, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferKLA Solid State
Specifications
ConfigurationNIST Traceable[1]Upgrade for KLA AIT II & XP Series Systems[3]
Wafer size8 inch[1]—
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]Metrology & Inspection[3]
OEM—KLA[3]
Family entry—KLA Solid State family[5]
Model entry—KLA Solid State Laser[5]
Description—solid-state laser upgrade for KLA AIT II and XP series systems[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com