Comparison ledger
KLA .496 PSL Wafer, Zeiss O Inspect 322 CMM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | O Inspect 322 CMMZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Zeiss O Inspect 322 CMM |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[4] |
| Wafer size | 8 inch[2] | — |
| Traceability | NIST Traceable[2] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[2] | — |
| Category | Metrology & Inspection[3] | — |
| P/N | — | 636520-9932-000[1] |
| Measuring volume X | — | 300 mm[4] |
| Measuring volume Y | — | 200 mm[4] |
| Measuring volume Z | — | 200 mm[4] |
| Measurement technology | — | Multisensor (optical, tactile passive)[4] |
| Pre-wired for optical sensor | — | Pre-wired for DotScan optical sensor[4] |
| Control | — | PC-based Integrated Scanning Control (ISC)[4] |
| Vibration damping | — | Integrated passive vibration damping[4] |
| Reference sphere diameter | — | 25 mm[4] |
| Reference ring inner diameter | — | 16 mm[4] |
| Optical calibration template | — | for Discovery Zoom lens[4] |
| Control panel | — | Wired control panel with two joysticks, power ON switch[4] |
| Tactile sensor | — | VAST XXT TL3 sensor[4] |
| Adapter plate | — | One VAST XXT TL3 adapter plate with embedded ID chip[4] |
| Network Interface | — | Network Interface Card (NIC) I201-T1 GbE[4] |
| Software | — | CALYPSO basis cnc + curve + VAST probing, BasLic, Dongle[4] |
| Multisensor technology | — | Optical, tactile passive[4] |
| Pre-wired for DotScan optical sensor | — | Yes[4] |
| Integrated Scanning Control (ISC) | — | PC-based[4] |
| Reference sphere | — | Diameter 25 mm[4] |
| Reference ring | — | Inner diameter 16 mm[4] |
| Sensor | — | VAST XXT TL3[4] |
| Network Interface Card | — | NIC I201-T1 GbE[4] |
| Electrical | — | 100-240 V, 50-60 Hz, max 600 VA[1] |
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