Waferpedia

Comparison ledger

15 Lapperversus1500 66 T Double Sided Optical

Lapmaster 15 Lapper, PR Hoffman 1500 66 T Double Sided Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
15 LapperLapmaster
OEMLapmasterPR Hoffman
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 15PR Hoffman 1500 66 T Double Sided Optical
Specifications
Number Of Conditioning RingsUp to 3[1]—
Ring IDUp to 5.5″[1]—
Plate Diameter – Outside15″[1]—
Plate Diameter – Inside3 1/2″[1]—
Standard RPM60[1]—
Drive Motor1/2 HP[1]—
Electrics110V / 1Ph / 60Hz[1]—
Dimensions – Approximate26″(L-R) x 21″(F-B) x 22″(H)[1]—
ConfigurationEquipped with:[1]Capacities:[2]
Equipped with: 15″ Cast Iron PlateIncluded[1]—
Equipped with: (3) Yoke/Roller Bearing AssembliesIncluded[1]—
Equipped with: (3) Conditioning RingsIncluded[1]—
Equipped with: (3) Hold DownsIncluded[1]—
Equipped with: 30 Minute TimerIncluded[1]—
Plate—15"[2]
Carriers—5.3"[2]
Teeth—66[2]
Downward force—15 - 200 Lbs.[2]
Top plate—1 - 135 RPM[2]
Ring gear—1 - 135 RPM[2]
Sun gear—1 - 103 RPM[2]
Type—double sided optical polisher[2]
Top plate speed—1 - 135 RPM[2]
Ring gear speed—1 - 135 RPM[2]
Sun gear speed—1 - 103 RPM[2]
Vintage—2000[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing