Waferpedia

Comparison ledger

EP1versus108T

Logitech EP1, PR Hoffman 108T, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
EP1Logitech
108TPR Hoffman
OEMLogitechPR Hoffman
CategoryCMPCMP
Wafer size100mmup to 12 in wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech EP1PR Hoffman 108T
Specifications
Product familyEP Polishing Pads and Cloths[1]—
Application typeChemical Mechanical Polishing (CMP)[1]—
Suitable applicationsoxide, nitride and copper[1]—
TypeChemical Mechanical Polishing (CMP) cloths and pads[1]—
Suitable materialsOxide, nitride and copper[1]—
Product typeChemical Mechanical Polishing (CMP) polishing cloths and pads[1]—
Applicationsoxide, nitride, and copper[1]—
Associated wafer process capacityup to 100mm/4"[2]—
carrier type listing—108T 9B - S/F / Lapmaster LSP-9 / etc.[3]
machine class—for double-sided planetary lapping & polishing machines[3]
wafer sizes stated on insert-carrier page—3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[3]
maximum carrier diameter stated on insert-carrier page—up to 33 in diameter[3]
maximum carrier diameter stated on lapping-carrier page—up to 48 in diameter[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org
  4. [4]web.archive.orgweb.archive.org