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FI 20160versusFI 20160 1 Microwave

MKS FI 20160, MKS FI 20160 1 Microwave, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
FI 20160MKS
FI 20160 1 MicrowaveMKS
OEMMKSMKS
Category—Thermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMKS FI 20160MKS FI 20160
Specifications
Power3.0 KW[1]—
Configurationfor AMAT P 5200[1]20 A[2]
Phase—SmartPower series - 3.0 kW - Liquid-cooled - 200–208 VAC, 3-phase - Remote / DeviceNet control[2]
Voltage—208 V[2]
FI 20160 entryFI 20160 1 Microwave entryAsk about these tools →Share experience with this comparison →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing