Comparison ledger
Nikon NSR S 210 D, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSR S 210 DNikon | 1000 FamilyUltratech |
|---|---|---|
| OEM | Nikon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon NSR | Ultratech 1000 Family |
| Specifications | ||
| Resolution | 110nm[1] | — |
| Manufacturer | Nikon[1] | — |
| Tool type | Scanner[1] | Photolithography step-and-repeat 1X stepper[3] |
| Light-source product group | Deep UV[2] | — |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →