Waferpedia

Comparison ledger

108Tversus6DE

PR Hoffman 108T, Strasbaugh 6DE, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
108TPR Hoffman
6DEStrasbaugh
OEMPR HoffmanStrasbaugh
CategoryCMPCMP
Wafer sizeup to 12 in wafers16 inch / 400 mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPR Hoffman 108TStrasbaugh 6DE
Cited variants—
Specifications
carrier type listing108T 9B - S/F / Lapmaster LSP-9 / etc.[2]—
machine classfor double-sided planetary lapping & polishing machines[2]—
wafer sizes stated on insert-carrier page3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[2]—
maximum carrier diameter stated on insert-carrier pageup to 33 in diameter[2]—
maximum carrier diameter stated on lapping-carrier pageup to 48 in diameter[3]—
Number of spindles—4[1]
Part capacity—16 inches (400 mm)[1]
Spindle motor power—1.5 HP DC each[1]
Eccentric motor power—0.75 HP DC each[1]
Air cylinders—4 for pressure down[1]
Capacity (12-inch variant)—12 inches[1]
Capacity (16-inch variant)—16 inches / 400 mm[1]
Drive system—DC[1]
Includes air cylinders for pressure down—Yes[1]
Capacity—16 in / 400 mm part diameter[1]
Spindle motors—Four 1.5 HP DC spindle motors[1]
Eccentric/oscillating arm motors—Four 3/4 HP DC motors[1]
Drive type—DC drive system[1]
Pressure down system—Four air cylinders for pressure down[1]
Machine type—Spindle grinder/polisher[1]
OEM—Strasbaugh[1]
Model—6DE[1]
Type—Spindle grinder/polisher[1]
Spindle count—6 spindle[1]
Controls—Fully equipped control panel[1]
Motors—Includes four 1.5 HP DC spindle motors and four 3/4 HP DC motors for the eccentric/oscillating arms[1]
Capacity variant—16 in parts capacity[1]
Rebuild status variant—Excell 2022/rebuild[1]
Maximum part diameter—16 inches (400 mm)[1]
Air cylinders for pressure down—Yes, included[1]
Part capacity (12-inch variant)—12 inches[1]
Part capacity (16-inch variant)—16 inches[1]
Category—Spindle grinder/polisher[1]
Designation—6DE-DC[1]
Parts capacity—16-inch parts capacity[1]
Eccentric motors—Four 3/4 HP DC motors for the eccentric/oscillating arms[1]
Pressure down—Four air cylinders[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org