Waferpedia

Comparison ledger

Delta 36 TA Wafer Maskversus1000FP

SUSS MicroTec Delta 36 TA Wafer Mask, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSUSS MicroTecYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySUSS MicroTec Delta 36 TA Wafer MaskYES 1000FP
Specifications
ManufacturerSUSS MicroTec[1]—
ModelDelta 36 TA Wafer Mask[2]Glen/YES 1000FP[3]
Equipment typeWafer Mask Cleaner[2]—
CategoryWet Processing / Clean[1]—
System type—Plasma cleaning system[3]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[3]
Designed use—Designed to accept a range of shelf sizes[3]
Application focus—Changing needs of the flat panel industry[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org