Comparison ledger
SUSS MicroTec MJB 4 Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MJB 4 MaskSUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MJB | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Front side Alignment[1] | — |
| Trinocular Split Field Microscope | Dual 5X & 10X Objectives[1] | — |
| OEM | SUSS MicroTec[2] | — |
| Model | MJB 4[3] | — |
| Exposure types | vacuum, hard, soft proximity contact[2] | — |
| Substrate size (max) | 4 inches in diameter[2] | — |
| Mask/substrate thickness capacity | 9.00 mm total[2] | — |
| Exposure optics | 400 nm[2] | — |
| Lamps | allowing sub-micron exposure in vacuum contact[2] | — |
| Photoresist tones | positive and negative[2] | — |
| Alignment type | topside only[2] | — |
| Minimum alignment mark separation (binocular) | 3.5 cm[2] | — |
| Typical pattern resolution | 1 µm[2] | — |
| Achievable alignment resolution | 1 µm[2] | — |
| Wafer sizes | 2, 3, 4, 12 inch[1] | — |
| Alignment features (as listed by reseller) | front side alignment; trinocular split field microscope with dual 5X & 10X objectives; video camera; high resolution alignment; Suss power supply[1] | — |
| Contact exposure modes | vacuum, hard, soft, proximity contact[2] | — |
| Substrate size | up to 4 inches in diameter[2] | — |
| Maximum mask and wafer total thickness | 9.00 mm[2] | — |
| Adjustment accuracy (X, Y, theta) | below 1 µm[2] | — |
| Exposure optics wavelength | 400 nm[2] | — |
| Topside alignment | yes[2] | — |
| Wafer sizes (listing) | 2, 3, 4, 12 inch[1] | — |
| Alignment type (listing) | Front side[1] | — |
| Microscope | Trinocular Split Field with Dual 5X & 10X Objectives[1] | — |
| Camera | Video Camera[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[4] |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
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