Comparison ledger
TEGAL 211, Tokyo Electron MK 7 S, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 211TEGAL | MK 7 STokyo Electron |
|---|---|---|
| OEM | TEGAL | Tokyo Electron |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | TEGAL 211 | Tokyo Electron MK 7 S |
| Specifications | ||
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Process Type | Plasma Asher/Etcher[2] | — |
| Wafer Size (max) | 3 inch[2] | — |
| Form Factor | Table top[2] | — |
| Chamber Material | Aluminum[1] | — |
| Chamber Internal Dimensions | 6 x 6 x 3.75 inches[1] | — |
| Timer Range | 0-99 minutes[2] | — |
| Configuration | — | SD/HD Typ Commandpost[3] |
| System Vers | — | MK8G2.38[3] |
| Alarm File | — | ALM00166.OEN[3] |
| Lines | — | 1(3)[3] |
| Pumps | — | 1x mini[3] |
| Backrinse | — | yes[3] |
| Rinse | — | yes[3] |
| Missing | — | resist pumps (2), developer line[3] |
| Wafer Size | — | 8 inch[3] |
| Type | — | SD/HD Typ[3] |
| System Version | — | MK8G2.38[3] |
| GEM | — | 1.72[3] |
| EBR | — | programmable[3] |
| T/H-Controller | — | Shinwa CP-I[3] |
| H-Nozzle Lines | — | 1 x H-Nozzle[3] |
| Vintage | — | 1995[3] |
| OEM | — | Tokyo Electron[3] |
| Model | — | MK 7 S[3] |
| Category | — | Coater / Developer[3] |
| Wafer sizes | — | 8 inch[3] |
| Special alarm file | — | AL00TT.OEN[3] |
| GEM version | — | 1.72[3] |
| H-Nozzle | — | 1 x H-Nozzle[3] |
| Control Interface | — | Commandpost[3] |
| EBR Programmable | — | yes[3] |
| Equipment type | — | Coater / Developer[3] |
| Spare alarm file | — | AL00TT.OEN[3] |
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