Comparison ledger
Temescal Simba2, Temescal SuperSweep64, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Simba2Temescal | SuperSweep64Temescal |
|---|---|---|
| OEM | Temescal | Temescal |
| Category | Deposition | Deposition |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2005 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Temescal Simba2 | Temescal SuperSweep64 |
| Specifications | ||
| Power supply | 15-kW Temescal Simba2[1] | — |
| System association | Listed as an upgrade option for FC-4400[1] | — |
| Power rating | 15 kW[4] | — |
| Product type | Power supply[5] | — |
| Function | E-beam power supply[6] | — |
| Associated systems | FC-4400, UEFC-5700, FC/BCD-2800[7] | — |
| Manufacturer | Temescal[5] | — |
| controller type | — | programmable beam sweep controller[1] |
| system association | — | listed under the FC-4400 system's electron beam source, power supply, and sweep section[1] |
| wafer capacity referenced in associated system | — | 30 150 mm wafers per load[1] |
| Type | — | programmable beam sweep controller[1] |
| Operation | — | fully digital operation[8] |
| Internal waveform storage | — | up to 64 patterns[8] |
| Addressable points | — | 1024[8] |
| Waveform types | — | sine, triangle, saw-tooth, clipped, and arbitrary[8] |
| Frequency range | — | 1 to 200 Hz[8] |
| Max. sweep current | — | -4 A to +4 A[8] |
| Power requirements | — | 100–240 V ac, 50–60 Hz[8] |
| Computer I/O ports | — | RS-232 and RS-485[8] |
| Compatible system | — | Temescal FC-4400 deposition system[9] |
| Compatibility | — | Compatible with almost any commercially available e-beam gun[10] |
| Waveform resolution | — | 8 bits (0.4%)[10] |
| Weight | — | 10 lbs[10] |
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