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Act 8 I-Line Trackversus1000 Family

Tokyo Electron Act 8 I-Line Track, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Act 8 I-Line TrackTokyo Electron
1000 FamilyUltratech
OEMTokyo ElectronUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced1999—
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generationi-line—
FamilyTokyo Electron ActUltratech 1000 Family
Cited variants
  • Act 8 I-Line Track, 8" 1C/3DI-Line[1]
  • Act 8 I-Line Track, 8" 2C/2DI-Line[2]
  • Tel Act 8 I-Line Track, 8" 1C/3D 1999 Vintagei-line[1]
  • Tel Act 8 I-Line Track, 8" 1C/3D 2000 Vintagei-line[3]
  • Tel Act 8 I-Line Track, 8" 2C/2D 2000 Vintagei-line[4]
  • Tel Act 8 I-Line Track, 8" 2C/2D 2001 Vintagei-line[2]
  • Act 8 1C/3D (1999)I-line[1]
  • Act 8 1C/3D (2000)I-line[5]
  • Act 8 2C/2D (2000)I-line[4]
  • Act 8 2C/2D (2001)I-line[2]
—
Specifications
Configuration1C/3D[1]—
MakeTel[1]—
ModelAct 8[1]—
Wafer Size8 inch[1]—
Vintage1999[1]—
GenerationI-Line[1]—
Tool type—Photolithography step-and-repeat 1X stepper[6]
Optical design—Wynne Dyson[6]
Magnification—1X[6]
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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]en.wikipedia.orgen.wikipedia.org