Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian Viision 200 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Viision 200 IonVarian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian Viision 200 |
| Specifications | ||
| Configuration | Platen ADV-S Type[1] | Gasbox:[3] |
| Type | ESC Platen ADV-S Type[1] | — |
| Category | Ion Implantation[2] | — |
| Implant Disc | — | 13 Site, Silicon Coated[3] |
| CE-Mark | — | Yes[3] |
| Average Time | — | 85%[3] |
| Computer System | — | 147 MHz Main & ES CPU[3] |
| Cleanroom Monitor | — | TFT[3] |
| Remote Service Monitor | — | Not Included[3] |
| String #1 - SDS | — | MKS P 2 A (calibrated for 10 sccm phosporus)[3] |
| PFG | — | Unit 8160 (configured for 5 sccm Xe)[3] |
| Wafer Sizes | — | 8 inch[3] |
| Source Type | — | Bernas Source[3] |
| Vintage | — | 1997[3] |
| Source Chamber Beam Kit | — | Included[3] |
| Source Turbo | — | Pfeiffer HiPace 1500C[3] |
| Beamline Turbo | — | Pfeiffer TPH 1201 U P[3] |
| Endstation Manifold Turbo Pump | — | Pfeiffer HiPace 300[3] |
| Cryo Compressor | — | 2x CTI 9600[3] |
| Cryo Pump | — | 4x CTI 250F[3] |
| Frequency Kit | — | 50 Hz[3] |
| Gasbox String 1 SDS | — | MKS P 2 A (calibrated for 10 sccm phosphorus)[3] |
| Gasbox String 2 SDS Unit | — | 1662 (calibrated for 10 sccm Arsine)[3] |
| Gasbox String 3 HP | — | calibrated for 10 sccm BF3[3] |
| Gasbox String 4 | — | Tylan FC 2900 (10 sccm Argon)[3] |
| New Infranor Amplifier | — | Xtra Puls[3] |
| Spin Amp | — | Kollmorgen Servo Star S 700[3] |
| Terminal Differential Pump | — | Membran Pump[3] |
| Endstation Differential Pump | — | Membran or Scroll Pump[3] |
| Voltage | — | 208 V[4] |
| Phase | — | 3 Phase[4] |
| Connection | — | Top[4] |
| Source | — | I.H.C (2nd Source Solutions, IBS Extencsy Source)[4] |
| String #2 - SDS | — | MKS-P2A: 10 sccm[4] |
| String #3 - HP | — | Unit UFC-8100: 10 sccm[4] |
| String #4 - HP | — | Tylan FC-2900MEP: 5 sccm[4] |
| Computer | — | 147 MHz & ES CPU[4] |
| Software | — | Ver. 6.24 (renewal of license from AMAT required)[4] |
| Remote Monitor | — | TFT (IFX Homemade Solutions)[4] |
| Terminal Differential Seal | — | Menbran[4] |
| Cryo Comp 1 | — | 9600 LV[4] |
| Cryo Comp 2 | — | 9600 LV[4] |
| Frequency | — | 50 hz Frequency Converter[4] |
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