Comparison ledger
Varian Viision 200, Varian Viision 200 Disk, Varian Viision 200 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Viision 200Varian | Viision 200 DiskVarian | Viision 200 IonVarian |
|---|---|---|---|
| OEM | Varian | Varian | Varian |
| Category | Ion Implantation | — | Ion Implantation |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | 1996– | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | Varian Viision 200 | Varian Viision 200 | Varian Viision 200 |
| Cited variants | — | — | |
| Specifications | |||
| Configuration | Medium Current[1] | Needs refurbishment[5] | Gasbox:[6] |
| Phase | 3 Phase[2] | — | 3 Phase[7] |
| Wafer size | 8 inch (200 mm)[1] | — | — |
| Process type | Batch[4] | — | — |
| Current type | High Current[4] | — | — |
| Energy range (VIISion 200 PLUS2) | Up to 200 keV[4] | — | — |
| Energy range (VIISion 80LE) | 250 eV to 80 keV[4] | — | — |
| Electrical requirements | 3 Phase, 5 Wire, 208 V, 50/60 Hz[2] | — | — |
| Voltage | 208 Volt[2] | — | 208 V[7] |
| Frequency | 50/60 Hz[2] | — | 50 hz Frequency Converter[7] |
| Vintage | 2000[2] | — | 1997[6] |
| Uptime | over 85%[4] | — | — |
| Equipment type | Ion implanter[1] | — | — |
| Model | Viision 200[1] | — | — |
| Current class | High current[4] | — | — |
| Wafer Size | — | 8 inch[5] | — |
| Implant Disc | — | — | 13 Site, Silicon Coated[6] |
| CE-Mark | — | — | Yes[6] |
| Average Time | — | — | 85%[6] |
| Computer System | — | — | 147 MHz Main & ES CPU[6] |
| Cleanroom Monitor | — | — | TFT[6] |
| Remote Service Monitor | — | — | Not Included[6] |
| String #1 - SDS | — | — | MKS P 2 A (calibrated for 10 sccm phosporus)[6] |
| PFG | — | — | Unit 8160 (configured for 5 sccm Xe)[6] |
| Wafer Sizes | — | — | 8 inch[6] |
| Source Type | — | — | Bernas Source[6] |
| Source Chamber Beam Kit | — | — | Included[6] |
| Source Turbo | — | — | Pfeiffer HiPace 1500C[6] |
| Beamline Turbo | — | — | Pfeiffer TPH 1201 U P[6] |
| Endstation Manifold Turbo Pump | — | — | Pfeiffer HiPace 300[6] |
| Cryo Compressor | — | — | 2x CTI 9600[6] |
| Cryo Pump | — | — | 4x CTI 250F[6] |
| Frequency Kit | — | — | 50 Hz[6] |
| Gasbox String 1 SDS | — | — | MKS P 2 A (calibrated for 10 sccm phosphorus)[6] |
| Gasbox String 2 SDS Unit | — | — | 1662 (calibrated for 10 sccm Arsine)[6] |
| Gasbox String 3 HP | — | — | calibrated for 10 sccm BF3[6] |
| Gasbox String 4 | — | — | Tylan FC 2900 (10 sccm Argon)[6] |
| New Infranor Amplifier | — | — | Xtra Puls[6] |
| Spin Amp | — | — | Kollmorgen Servo Star S 700[6] |
| Terminal Differential Pump | — | — | Membran Pump[6] |
| Endstation Differential Pump | — | — | Membran or Scroll Pump[6] |
| Connection | — | — | Top[7] |
| Source | — | — | I.H.C (2nd Source Solutions, IBS Extencsy Source)[7] |
| String #2 - SDS | — | — | MKS-P2A: 10 sccm[7] |
| String #3 - HP | — | — | Unit UFC-8100: 10 sccm[7] |
| String #4 - HP | — | — | Tylan FC-2900MEP: 5 sccm[7] |
| Computer | — | — | 147 MHz & ES CPU[7] |
| Software | — | — | Ver. 6.24 (renewal of license from AMAT required)[7] |
| Remote Monitor | — | — | TFT (IFX Homemade Solutions)[7] |
| Terminal Differential Seal | — | — | Menbran[7] |
| Cryo Comp 1 | — | — | 9600 LV[7] |
| Cryo Comp 2 | — | — | 9600 LV[7] |
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