ASML Twinscan

Models in this family

1. 

   Twinscan 1200 B

   The ASML Twinscan 1200 B is a lithography scanner equipped with a Cymer XLA 160 laser, but it is non-operational due to an internal water leak near the lens and has no lens data available.

2. 

   Twinscan 1700 i-P
3. 

   Twinscan 1950 i Immersion

   The ASML Twinscan 1950 i is an immersion scanner used in semiconductor lithography.

4. 

   Twinscan AT 1100

   The ASML Twinscan AT 1100 is a 193 nm ArF laser-based lithography scanner that processes 200 mm and 300 mm wafers using dual-wafer stage technology.

5. Twinscan AT 400 S i-Line

   The ASML Twinscan AT 400 S is an i-line scanner stated to be a 365 nm system from 2001.

6. 

   Twinscan AT 750 B

   The ASML Twinscan AT 750 B is a semiconductor tool identified with a Cymer ELS 6600 laser and a Tel Lithius Track configuration.

7. 

   Twinscan NXT 1980 i

   The ASML Twinscan NXT 1980 i is a 12-inch wafer lithography scanner that was upgraded from the 1970i model.

8. 

   Twinscan XT 1950 Hi

   ASML Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity.