Canon FPA

Models in this family

1. 

   FPA 2000 i 2

   The Canon FPA 2000 i 2 is a stepper.

2. 

   FPA 2001 i 1

   The Canon FPA 2001 i 1 is a stepper manufactured by Canon.

3. 

   FPA 3030 i 5+ Fine Pattern

   The Canon FPA 3030 i 5+ Fine Pattern is a lithography stepper with an i-line 365 nm source, a 5:1 reduction ratio, and a 22 mm x 22 mm field size.

4. 

   FPA 5000 ES 3

   Canon FPA 5000 ES 3 is a lithography stepper identified with a Cymer ELS 6300 Laser and a Rasco BCU 900 Brine Chilling Unit.