Tool family
Edwards IH 1800 Pump.
The Edwards IH 1800 is a dry vacuum pump system comprising an HCDP160 dry pump and HMB1800 mechanical booster, designed for harsh semiconductor processes like PECVD and LPCVD.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| iH-1800 / iH 1800 / iH1800 | — | — | Same model name appears with minor spelling and spacing variations in the sources. | ajvs.com[1] |