Waferpedia

Tool family

Edwards XDS 10 Scroll

Edwards1 entry

Models in this family

  1. The Edwards XDS 10 is a dry scroll vacuum pump designed for clean pumping applications, with a maximum displacement of 13.4 m³/h at 60 Hz and ultimate total pressure of 6×10⁻² mbar at 60 Hz.

    Cited variants

    DesignationGenerationVintageChangesSource
    Edwards XDS 10 (1-phase 115/230 V, North America)——Single-phase motor configured for 115 V or 230 V supply, pre-set to 115 V for North America; part number A72601906.idealvac.com[1]
    Edwards XDS 10 (1-phase 115/230 V, Europe/UK)——Single-phase motor configured for 115 V or 230 V supply, pre-set to 230 V for Europe/UK; part number A72601903.idealvac.com[1]
    Edwards XDS 10 (1-phase 100/200 V, Japan)——Single-phase motor configured for 100 V or 200 V supply, pre-set to 200 V for Japan; part number A72601904.idealvac.com[1]
    Edwards XDS 10 (3-phase 200/380/415/460 V)——Three-phase motor, voltage configurable to 200–230 V or 380–460 V, pre-set to 380–460 V; part number A72601905.idealvac.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com