Waferpedia

Tool family

Espec EHS-222M-L

The EHS-222M-L is an ESPEC large highly accelerated stress test system. The EHS-222M-L has an interior dimension of φ394×L626 mm.

Models in this family

  1. The EHS-222M-L is an ESPEC large highly accelerated stress test system. The EHS-222M-L has an interior dimension of φ394×L626 mm.

    Cited variants

    DesignationGenerationVintageChangesSource
    EHS-222(M)———espec.co.jp[1]
    EHS-222MD———espec.co.jp[1]
    EHS-212(M)——Smaller: φ294 × L318 mmespec.co.jp[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp