Waferpedia

Tool family

Espec HRS-357HS-25

Espec1 entry

The Espec HRS-357HS-25 is a rapid-rate thermal cycle chamber with a temperature and humidity range of −70°C to +180°C and 25°C/min temperature change rate.

Models in this family

  1. The Espec HRS-357HS-25 is a rapid-rate thermal cycle chamber with a temperature and humidity range of −70°C to +180°C and 25°C/min temperature change rate.