EV Group 6200 NT

Models in this family

1. 

   6200 NT

   The EVG 6200 NT is a mask alignment system for optical lithography with wafer sizes up to 200 mm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   EVG6200 NT Gen2	—	—	Fully-housed variant mentioned alongside semi-automated and automated configurations.	evgroup.com[1]

Sources