Waferpedia

Tool family

KLA Puma 9130

Models in this family

  1. The KLA Puma 9130 is a metrology and inspection tool from KLA.

    Cited variants

    DesignationGenerationVintageChangesSource
    Puma 9130 Darkfield Defect——Described as a darkfield defect inspection system.waferpedia.com[1]
  2. KLA Puma 9130 Darkfield Defect Inspection System is a darkfield defect inspection system from KLA.

All entries

  1. Puma 9130KLA

    The KLA Puma 9130 is a metrology and inspection tool from KLA.

    CategoryMetrology & Inspection
    16 specs
  2. Puma 9130 Darkfield DefectKLA

    KLA Puma 9130 Darkfield Defect Inspection System is a darkfield defect inspection system from KLA.

    CategoryMetrology & Inspection
    1 spec

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com