KLA Surfscan 6220

Models in this family

1. 

   Surfscan 6220

   KLA Surfscan 6220 is an unpatterned surface inspection system for wafer particle and surface defect inspection.

2. 

   Surfscan 6220 Particle Defect

   The KLA Surfscan 6220 Particle Defect is a particle inspection system in the Metrology & Inspection category.

3. Surfscan 6220 Refurbishment Services

   KLA Surfscan 6220 Refurbishment Services is a refurbishment-only offering for a client system.

4. 

   Surfscan 6220 Wafer

   The KLA Surfscan 6220 is a wafer inspection system for particle detection and surface analysis on 200 mm wafers.