KLA Surfscan 6420

Models in this family

1. Surfscan 6420

   The KLA-Tencor Surfscan 6420 is a surface analysis instrument for detecting, counting, and sizing particle defects on unpatterned wafers.

2. 

   Surfscan 6420 Particle Defect
3. Surfscan 6420 Refurbishment Services

   KLA Surfscan 6420 Refurbishment Services are offered as refurbishment only for a client system with a solid state laser and upgraded components.

4. 

   Surfscan 6420 Unpatterned Surface

   The KLA Surfscan 6420 is an unpatterned surface inspection system for 8-inch wafers.