Tool family
The Kurt J Lesker Nano36 is listed as a thermal deposition system used in cleanroom nanofabrication.
The Kurt J Lesker Nano36 Thermal Deposition System is a cleanroom thin film fabrication tool for thermal deposition of metals. The Kurt J Lesker Nano36 Thermal Deposition System supports substrates up to 150 mm in diameter and uses controller-based thickness monitoring.