Lam Research TCP 9400

Models in this family

1. TCP 9400produced 1996–

   The Lam Research TCP 9400 is a Transformer Coupled Plasma (TCP) etcher for selective etching of silicon and polysilicon.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   TCP 9400 SE	—	1996	Model 9408, Rainbow platform, Envision v1.4, single chamber stand-alone, ceramic free chamber with waferless auto clean, 8-inch wafer size, cassette to cassette transport	photonicmicrodevices.com[1]

Sources