Waferpedia

Tool family

MKS Vision 2000-E™

MKS1 entry

The Vision 2000-E™ is a residual gas analyzer for multi-pressure, CVD and ALD processes with a minimum detectable partial pressure below 2e-11 Torr.

Models in this family

  1. The Vision 2000-E™ is a residual gas analyzer for multi-pressure, CVD and ALD processes with a minimum detectable partial pressure below 2e-11 Torr.