Waferpedia

Tool family

Nikon 1505

NikonLithography3 entries

Models in this family

  1. Nikon 1505 is referenced in a lithography process condition as a g-line exposure tool with 0.54 NA.

  2. 1505 G 6 Eproduced 1988–

    The Nikon 1505 G 6 E is a g-line stepper introduced in 1988 with a numerical aperture of 0.54 and a resolution of 650 nm.

  3. The Nikon 1505 G 7 E is a stepper used in lithography on 6-inch wafers with a 5-inch reticle.

All entries

  1. 1505Nikon

    Nikon 1505 is referenced in a lithography process condition as a g-line exposure tool with 0.54 NA.

    2 specs
  2. 1505 G 6 ENikon

    The Nikon 1505 G 6 E is a g-line stepper introduced in 1988 with a numerical aperture of 0.54 and a resolution of 650 nm.

    CategoryLithography
    19 specs
  3. 1505 G 7 ENikon

    The Nikon 1505 G 7 E is a stepper used in lithography on 6-inch wafers with a 5-inch reticle.

    CategoryLithography
    6 specs