Waferpedia

Tool family

Nikon R10

NikonLithography1 entry

The Nikon R10 is a 1986 i-line stepper for 150 mm wafers used in semiconductor lithography.

Models in this family

  1. R10introduced 1986produced 1973–1979i-lineDiscontinued

    The Nikon R10 is a 1986 i-line stepper for 150 mm wafers used in semiconductor lithography.

    Cited variants

    DesignationGenerationVintageChangesSource
    Nikon R8 SUPER ZOOM—1973Successor to the conventional 8X SUPER ZOOM, with a 7.5~60 mm F1.8 (9-group 13-element) zoom lens; released at the same time as the R10 SUPER ZOOM and less expensive.imaging.nikon.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]imaging.nikon.comimaging.nikon.com