Waferpedia

Tool family

OAI Model 6020

OAILithography1 entry

The OAI Model 6020 is a mask aligner and UV exposure system listed in the resources section of the OAI website.

LinkedIn X Email

Models in this family

  1. Model 6020

    The OAI Model 6020 is a mask aligner and UV exposure system listed in the resources section of the OAI website.