Onto Innovation Nanospec AFT

Models in this family

1. 

   Nanospec AFT 4000 Film Thickness Measurement

   The Onto Innovation / Nanometrics Nanospec AFT 4000 is a film thickness measurement system.

2. 

   Nanospec AFT 4150 Thin Film Measurement

   The Nanometrics NanoSpec AFT 4150 is a visible-light reflectometry system for non-contact thin film thickness measurement on semiconductor wafers and flat substrates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   NanoSpec/AFT 4150 Visible	—	—	Optimized for the visible wavelength range and commonly used for oxide and nitride films in the range of tens to thousands of angstroms.	recycledgoods.com[1]

Sources