Pfeiffer ADS 602 H

Models in this family

1. ADS 602 H

   The Pfeiffer ADS 602 H (also known as Adixen ADS 602 H) is a multistage Roots dry pump from the ADP/ADS Series Two, designed for harsh duty semiconductor vacuum processes.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ADS 602 P	—	—	Process duty variant	ptbsales.com[1]
   ADS 602 LM	—	—	Light to medium duty variant	ptbsales.com[1]

Sources