Waferpedia

Tool family

Plasma-Therm Mark 40

Plasma-Therm1 entry

The Plasma-Therm Mark 40 is a wafer-based plasma processing system listed in Plasma-Therm's product lineup for etching and deposition applications.

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Models in this family

  1. Mark 40

    The Plasma-Therm Mark 40 is a wafer-based plasma processing system listed in Plasma-Therm's product lineup for etching and deposition applications.