Tool family
Semitool 421
Semitool2 entries
Models in this family
The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.
Cited variants
Designation Generation Vintage Changes Source SST 421-280 — — Upgraded with hfsemi CPU system, class 1 touch screen monitor, pneumatic pumps, Trebor 610 back hfsemi.com[1] The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.
Cited variants
Designation Generation Vintage Changes Source SST 421-280 — — Upgraded with hfsemi CPU-System, Class 1 Touch Screen Monitor, Pneumatic Pumps, Trebor 610 back hfsemi.com[1]
All entries
- 421 Scepter Spray SolventSemitool
The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.
CategoryWet Processing / CleanWaferBatch Solvent Processor for Wafer Cleaning18 specs - 421 Spray SolventSemitool
The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.
CategoryWet Processing / CleanWaferBatch Solvent Processor for Wafer Cleaning16 specs
Sources
Sources (1)Every fact above is drawn from these public sources
- [1]hfsemi.comhfsemi.com