Waferpedia

Tool family

Strasbaugh 6 Y 1

StrasbaughCMP1 entry

Strasbaugh 6 Y 1 Grinder Polisher.

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Models in this family

  1. 6 Y 1

    The Strasbaugh 6 Y 1 is a chemical mechanical planarization (CMP) system, a class of machine used to polish and planarize semiconductor wafers during integrated circuit fabrication.