Waferpedia

Tool family

SUSS MicroTec 350W MJB3 Mask

Models in this family

  1. The SUSS MicroTec 350W MJB3 Mask Aligner is a top-side mask aligner configured for 3-inch wafers. The SUSS MicroTec 350W MJB3 Mask Aligner uses a 350 watt lamphouse and UV400 exposure optics for 365nm and 405nm exposure.