Waferpedia

Tool family

SUSS MicroTec AS8 / 12

SUSS MicroTec1 entry

The SUSS MicroTec AS8 / 12 is a manual coating and developing system for wafers up to 300 mm, with spray coating as its primary process.

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Models in this family

  1. AS8 / 12

    The SUSS MicroTec AS8 / 12 is a manual coating and developing system for wafers up to 300 mm, with spray coating as its primary process.