Waferpedia

Tool family

SUSS MicroTec LabSpin6 / 8

SUSS MicroTec1 entry

The LabSpin6 / 8 is a manual coating and developing system for substrates up to 200 mm, capable of spin coating and puddle developing.

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Models in this family

  1. LabSpin6 / 8

    The LabSpin6 / 8 is a manual coating and developing system for substrates up to 200 mm, capable of spin coating and puddle developing.